National Institute of Standards and Technology


PROJECT: MEMS Research Facility


NIST had purchased a MEMS furnace to expand their research and manufacturing abilities. The area selected for the ISO Class 4 cleanrooms needed for this expansion was within a 1940’s circa concrete structure. Western Environmental Corporation was to complete the partial design started by SDR, demolish the existing rooms and equipment within the area, and structural roof supports for the HVAC equipment, install and certify approximately 2000 S.F. of Class 100 cleanrooms complete with fume hood work stations.

The installation utilized Fabline Wall System, re-circulating air handlers from Clean-Pak and the Hunt-Air plenum style gel ceiling system.